| Product ID | Formula | Purity | Dimension | Quantity | Price in € | Inquiry |
|---|---|---|---|---|---|---|
| 2200ST001 | Ti | 99.5% | Ø 63mm x 32mm | 1 | POR | Inquire |
| 2200ST002 | Ti | 99.5% | Ø 100mm x 40mm | 1 | POR | Inquire |
| 2200ST003 | Ti | 99.99% | Ø 50.8mm x 3.175mm | 1 | POR | Inquire |
| 2200ST004 | Ti | 99.99% | Ø 76.2mm x 3.175mm | 1 | POR | Inquire |
| 2200ST005 | Ti | 99.999% | Ø 50.8mm x 6.35mm | 1 | 461.00 | Inquire |
| 2200ST006 | Ti | 99.999% | Ø 76.2mm x 3.175mm | 1 | 367.00 | Inquire |
| 2200ST007 | Ti | 99.999% | Ø 76.2mm x 6.35mm | 1 | 467.00 | Inquire |
| 2200ST008 | Ti | 99.999% | Ø 101.6mm x 6.35mm | 1 | 594.00 | Inquire |
| 2200ST009 | Ti | 99.999% | Ø 203.2mm x 6.35mm | 1 | POR | Inquire |
Titanium sputtering targets are high-purity metallic targets widely used for Physical Vapor Deposition (PVD) thin-film coating processes. Titanium exhibits excellent corrosion resistance, strong adhesion, high mechanical strength, and outstanding chemical stability, making it an ideal material for semiconductor, optical coating, decorative coating, and advanced industrial applications.
VIMATERIAL supplies high-purity titanium sputtering targets with purity up to 99.999% (5N). Our targets are manufactured through vacuum melting, precision machining, and strict quality inspection to ensure excellent density, uniform microstructure, low impurity content, and stable sputtering performance. Contact us for more information.
| Property | Value |
| Chemical formula | Ti |
| Atomic Number | 22 |
| Molecular Weight | 47.867 g/mol |
| Appearance | Silvery-white metallic |
| Purity | 99.5%–99.999% |
| Density | 4.506 g/cm³ |
| Melting Point | 1660°C |
| Boiling Point | 3287°C |
| Crystal Structure | Hexagonal Close-Packed (HCP) |
| Thermal Conductivity | 21.9 W/m·K |
| Electrical Resistivity | 42 nΩ·m |
VIMATERIAL manufactures titanium sputtering targets in a wide variety of configurations.
Purity
Shape
Backing Plate
Custom dimensions and OEM specifications are available upon request.
Pure Titanium Target
Pure titanium sputtering targets provide excellent corrosion resistance, stable sputtering behavior, and high film purity. They are widely used for semiconductor metallization, optical coatings, decorative coatings, and thin-film research.
Titanium Alloy Targets
Titanium alloy sputtering targets combine titanium with elements such as aluminum (TiAl), silicon (TiSi), tungsten (TiW), or nickel to achieve enhanced hardness, conductivity, oxidation resistance, or wear resistance for specialized thin-film applications.
Titanium sputtering targets are widely used for depositing high-performance thin films in semiconductor, optical, decorative, and industrial coating applications.
Every titanium sputtering target undergoes strict quality inspection before shipment to ensure consistent sputtering performance and reliable thin-film deposition.
Inspection items include:
Certificates of Analysis (COA) are available upon request.
Titanium sputtering targets are vacuum-sealed and packaged with protective cushioning to prevent contamination and mechanical damage during transportation.
Store the product in a clean, dry, and well-ventilated environment. Avoid exposure to moisture, corrosive chemicals, and direct impacts before installation.
Q1. What purity of titanium sputtering targets do you offer?
Standard purities include 99.5%, 99.99%, and 99.999%. Higher purity grades can be customized upon request.
Q2. Can you manufacture custom dimensions?
Yes. We produce targets according to customer drawings or specifications, including diameter, thickness, shape, and backing plate requirements.
Q3. Which sputtering methods are suitable?
Titanium targets are compatible with DC magnetron sputtering, RF sputtering, and other PVD coating systems.
Q4. Are bonded titanium targets available?
Yes. We offer bonded and unbonded targets with copper, stainless steel, or customized backing plates.
Q5. What industries commonly use titanium sputtering targets?
Titanium sputtering targets are widely used in semiconductor manufacturing, optical coatings, decorative coatings, solar energy, hard coatings, data storage, and scientific research.
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
Contact our team of experts today and let us help you with your business!
