| Product ID | Formula | Purity | Dimension | Quantity | Price in € | Inquiry |
|---|---|---|---|---|---|---|
| 140600ST001 | SiC | 99.5% | 299.6mm x 129mm x 5mm | 1 | POR | Inquire |
| 140600ST002 | SiC | 99.5% | Ø 25.4mm x 3.175 mm | 1 | POR | Inquire |
| 140600ST003 | SiC | 99.5% | Ø 25.4mm x 6.35 mm | 1 | POR | Inquire |
| 140600ST004 | SiC | 99.5% | Ø 50.8mm x 3.175 mm | 1 | POR | Inquire |
| 140600ST005 | SiC | 99.5% | Ø 50.8mm x 6.35 mm | 1 | POR | Inquire |
| 140600ST006 | SiC | 99.5% | Ø 76.2mm x 3.175mm | 1 | POR | Inquire |
| 140600ST007 | SiC | 99.5% | Ø 76.2mm x 6.35mm | 1 | POR | Inquire |
| 140600ST008 | SiC | 99.5% | Ø 101.6mm x 3.175 mm | 1 | 436.00 | Inquire |
Silicon carbide sputtering targets are manufactured from a wide-bandgap ceramic semiconductor featuring exceptional hardness, high thermal conductivity, excellent thermal stability, and outstanding chemical resistance. These properties make SiC an ideal material for semiconductor, optical coating, and high-power electronic applications.
VIMATERIAL offers high-purity SiC targets, available in various sizes to meet your needs. Contact us for more information.
Hardness and wear resistance: Silicon carbide has a Mohs hardness of approximately 9.2–9.5, providing excellent wear resistance and minimizing particle generation during sputtering, resulting in longer target life and improved process stability.
Thermal stability: With a melting point above 2700°C and high thermal conductivity, silicon carbide maintains excellent dimensional stability under high-power sputtering conditions.
Electrical & optical properties: Silicon carbide provides excellent electrical performance together with a wide bandgap and high dielectric strength, making it suitable for semiconductor devices, RF electronics, and optical thin films.
| Property | Value |
| Material | Silicon Carbide |
| Formula | SiC |
| Purity | 99.5% |
| Density | ≥98% Theoretical |
| Shape | Round / Rectangular / Custom |
| Thickness | 3–20 mm |
| Bonding | Indium / Elastomer / Custom |
| Surface Finish | Ground / Polished |
| Manufacturing | Hot Pressing / Sintering |
Typical SiC sputtering targets are available in:
Thickness:
Custom sizes, backing plate bonding, and machining tolerances are available according to customer drawings.
Silicon carbide sputtering targets are widely used for:
Q1. What is a silicon carbide (SiC) sputtering target?
A silicon carbide target is a high-purity target material used in physical vapor deposition (PVD) to deposit SiC thin films. It is valued for its high hardness, excellent thermal conductivity, chemical stability, and wide bandgap, making it suitable for semiconductor, optical, and high-temperature applications.
Q2. What are silicon carbide sputtering targets used for?
It’s commonly used for semiconductor devices, power electronics, RF components, optical coatings, MEMS devices, wear-resistant coatings, and thin-film solar cells. They are also used in aerospace and other high-temperature industrial applications.
Q3. Can you offer custom service?
Yes. Custom sizes, shapes, thicknesses, backing plate bonding, and machining tolerances can be provided based on your sputtering system specifications or technical drawings.
Q4. Is a bonded backing plate available?
Yes. Silicon carbide sputtering targets can be supplied with bonded backing plates using suitable bonding materials and processes to improve heat dissipation, mechanical stability, and sputtering performance.
Q5. What deposition methods are compatible with SiC sputtering targets?
Silicon carbide sputtering targets are compatible with DC magnetron sputtering, RF magnetron sputtering, and reactive sputtering, depending on the conductivity of the target and the desired film properties.
Q6. What factors affect the performance of a SiC sputtering target?
Target purity, density, grain size, manufacturing process, surface finish, and bonding quality all influence sputtering stability, deposition rate, particle generation, and thin-film uniformity. High-density, high-purity targets generally provide longer service life and more consistent coating performance.
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
Contact our team of experts today and let us help you with your business!
