| Product ID | Formula | Purity | Dimension | Quantity | Price in € | Inquiry |
|---|---|---|---|---|---|---|
| 720800ST001 | HfO2 | 99.95% (Zr< 0.5wt%) | Ø 76.2 mm x 3.175 mm | 1 | POR | Inquire |
| 720800ST002 | HfO2 | 99.95% (Zr< 0.5wt%) | Ø 76.2 mm x 6.35 mm | 1 | POR | Inquire |
| 720800ST003 | HfO2 | 99.95% (Zr< 0.5wt%) | Ø 101.6 mm x 6.35 mm | 1 | POR | Inquire |
Hafnium oxide sputtering targets (HfO2) are high-performance vacuum coating materials. Using high-purity hafnium oxide as raw material, thin films are fabricated through physical vapor deposition (PVD) in various vacuum coating scenarios. These films are key materials in many high-tech fields such as semiconductors, optics, and electronics, and have broad application prospects.
Our high-purity hafnium oxide can be customized in size and shape (planar, rectangular, and irregularly shaped targets) according to requirements. Vacuum packaging ensures product stability. Contact us for more information.
Purity: Typically ≥99.95% to ensure stable film quality.
Density: Theoretical density ~9.68 g/cm³; actual targets should be ≥90% of this value.
Hardness: High (Mohs ~6.5), providing good wear resistance and long service life.
Thermal Conductivity: Low (~3–5 W/m·K), requiring effective cooling during sputtering.
Melting Point: Very high (~2810°C), allowing operation under high ენერგy conditions.
Grain Size: Usually 1–10 μm; finer grains improve film uniformity and density.
Crystal Structure: Includes monoclinic, tetragonal, and cubic phases; selection depends on application.
Hafnium oxide targets are vacuum-sealed, placed in an anti-static plastic bag, cushioned with foam material, and finally placed in a sturdy, clean cardboard box or wooden crate. The material grade, purity, size, and batch number are clearly labeled to ensure traceability and quality control.
Hafnium oxide targets should be stored in a clean, dry, and temperature-stable environment to maintain their performance. It is recommended to keep them in their original sealed packaging until use, and keep them away from moisture, dust, and corrosive substances. Avoid direct contact with bare hands to prevent contamination; gloves or clean tools should be worn during handling.
Q1: What is hafnium oxide？
A: Hafnium oxide (HfO₂) is an inorganic compound composed of hafnium and oxygen. It is an important functional material belonging to the transition metal oxide family. It possesses a high melting point (approximately 2810℃), high hardness (Mohs hardness 6.5-7.5), and excellent chemical stability, being virtually insoluble in water and most acids (except hydrofluoric acid) at room temperature. These properties make it a core material in high-temperature materials, optical coatings, and electronic devices.
Q2: What is hafnium oxide used for?
A: Hafnium oxide (HfO₂) is an important inorganic compound. Due to its high thermal neutron absorption cross-section, it is a key material for nuclear reactor control rods and also has wide applications in semiconductors, optics, and advanced memory technologies.
Nuclear Energy and High Temperature Engineering: Nuclear reactor control rods and protective materials, high-temperature refractory and coating materials, hafnium metal preparation and precursors.
Semiconductor and Microelectronics: Transistor gate dielectric layers, memory applications, other electronic components.
Optics and Multifunctional Materials: Optical coatings and laser materials, ceramics and catalysts, special functional materials.
Q3: Can hafnium oxide target be customized?
A: Yes, hafnium oxide (HfO2) sputtering targets can be fully customized to meet specific application requirements. We offer tailored solutions in terms of purity levels, dimensions, and shapes to suit different deposition processes and equipment. Whether you need standard discs, rectangular targets, or special geometries, our team can manufacture according to your technical drawings and specifications. This ensures optimal performance, compatibility, and efficiency for your particular application.
Q4: What is the lead time for hafnium oxide targets?
A: In Stock: Immediate shipping
Standard Products: Generally 2-4 Weeks
Customized Products: Determined based on required details
Special requirements can be discussed
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
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