| Product ID | Formula | Purity | Dimension | Quantity | Price in € | Inquiry |
|---|---|---|---|---|---|---|
| 401400ST001 | ZrSi2 | 99.5% (Zr + Hf) | Ø 50.8 mm x 3.175 mm | 1 | POR | Inquire |
| 401400ST002 | ZrSi2 | 99.5% (Zr + Hf) | Ø 76.2 mm x 6.35 mm | 1 | POR | Inquire |
| 401400ST003 | ZrSi2 | 99.5% (Zr + Hf) | Ø 232.4 mm x 6.35 mm | 1 | POR | Inquire |
Zirconium Silicide sputtering targets are high-purity, high-density, chemically stable materials with compatible crystal structures, which are prepared by a variety of methods and are widely used in the fields of semiconductors, electronic devices, optics and coatings.
VIMATERIAL offers high-purity zirconium silicide targets, granules, and powders. Custom sizes and particle sizes are available upon request. Contact us for more information.
Density: Typically ranges from 4.8–5.5 g/cm³.
Melting Point: High melting point of approximately 1500–1550°C, providing excellent thermal stability.
Hardness: Mohs hardness of around 7–8, offering good wear resistance and durability.
Crystal Structure: Features a well-defined crystal structure, commonly cubic, which helps ensure consistent film quality and sputtering performance.
Thermal Expansion Coefficient: Approximately 6×10⁻⁶/°C to 8×10⁻⁶/°C within 20–1000°C, enabling good compatibility with various substrate materials and reducing film stress during deposition and operation.
Electrical Resistivity: Typically in the range of 10⁻⁴–10⁻³ Ω·cm, meeting the conductivity requirements for electrical and electronic applications.
Semiconductor Applications: It is widely used in semiconductor devices for insulating layers, diffusion barriers, and metal gates. Its high dielectric properties and low leakage current help enhance device performance, reliability, energy efficiency, and integration density.
Electronic Devices: In integrated circuits, thin-film transistors (TFTs), and liquid crystal displays (LCDs), zirconium silicide films serve as electrode, interconnection, and contact materials, offering excellent electrical conductivity, stability, and strong film adhesion.
Optical Applications: Zirconium silicide films are used in optical coatings such as anti-reflective, reflective, and optical filter films. Their suitable refractive index and optical properties enable precise light control, making them valuable in optical instruments, optical communication systems, and solar photovoltaic applications.
Protective Coatings: As a high-performance coating material, it is used to produce wear-resistant, corrosion-resistant, and high-temperature-resistant coatings. These coatings significantly improve the hardness, oxidation resistance, and service life of cutting tools, molds, and aerospace components.
Zirconium Silicide targets are typically vacuum-sealed, moisture-proof packaging with protective cushioning to prevent oxidation, contamination, and mechanical damage during transportation.
Store the targets in a dry, cool, and clean environment, preferably in sealed packaging at room temperature, away from humidity, acids, and oxidizing agents to maintain material purity and sputtering performance.
Q1: What are Zirconium Silicide sputtering targets?
A: Zirconium Silicide sputtering targets are high-purity intermetallic materials used in physical vapor deposition (PVD) processes to deposit thin films with excellent electrical, thermal, and mechanical properties for advanced functional coatings.
Q2: What is Zirconium Silicide used for?
A: It is widely used in semiconductor devices (such as barrier and conductive layers), electronic components (ICs, TFTs, LCDs), optical coatings (anti-reflective and reflective films), and protective coatings requiring high hardness, wear resistance, and thermal stability.
Q3: How to order Zirconium Silicide sputtering targets?
A: You can order it based on your required parameters (such as purity, size, shape, bonding type, and substrate compatibility). Contact us directly for customization, quotations, and delivery time confirmation.
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
Contact our team of experts today and let us help you with your business!
