Silicon

Silicon rotary targets, also known as silicon tube targets, are cylindrical sputtering targets made from high-purity silicon (Si) and designed for rotary cathode sputtering systems. With a typical diamond cubic crystal structure, dark grey to metallic grey appearance, and good thermal stability, silicon rotary targets are used for semiconductor, photovoltaic, optical coating and functional thin-film applications.

VIMATERIAL supplies silicon rotary targets in different purity grades and configurations, including sprayed tube targets in 99.9% and 99.95% purity and bonded tube targets up to 99.999% purity. Target dimensions, tube geometry and bonding configuration can be customized according to your sputtering equipment and technical requirements.

With professional experience in rotary target manufacturing and target bonding, VIMATERIAL provides material selection, customized target production and bonding support for laboratory, pilot and industrial applications. Contact us for more information.

Key Features

• High-purity silicon
• Uniform composition
• Rotary tube configuration
• Sprayed or bonded construction
• Customized dimensions
• Professional bonding service
• Flexible customization

Physical Properties of Silicon

Specifications

For customized silicon rotary targets, please provide the target drawing, tube dimensions, required purity, sputtering system and bonding requirements.

Sprayed Silicon Tube Targets

VIMATERIAL supplies sprayed silicon tube targets in 99.9% and 99.95% purity for applications where a cost-effective rotary target configuration and reliable sputtering performance are required.

The sprayed target structure is suitable for specific rotary sputtering systems and can be customized according to target dimensions and equipment requirements.

Bonded Silicon Tube Targets

For applications requiring higher material purity and a specific rotary cathode configuration, VIMATERIAL supplies bonded silicon tube targets up to 99.999% purity.

Professional target bonding helps establish a reliable connection between the silicon target and the backing tube or assembly, supporting heat transfer and mechanical stability during sputtering.

Applications of Silicon Rotary Targets

• Semiconductor and Microelectronics: Silicon rotary targets can be used in PVD processes for depositing silicon-containing thin films and functional layers in semiconductor and microelectronics research and manufacturing.
• Photovoltaics: Silicon targets are used in thin-film deposition processes associated with photovoltaic and solar-energy materials, where controlled film composition, thickness and uniformity are important.
• Optical Coatings: Silicon rotary targets can be used to deposit silicon-containing films for optical coatings, filters, protective layers and other thin-film optical components.
• Architectural and Functional Glass: Silicon-containing layers can be incorporated into multilayer coating systems for architectural glass and functional coated glass, including applications where optical, protective or barrier properties are required.

Why Use a Rotary Silicon Target?

Compared with conventional planar target configurations, rotary targets are designed for rotary cathode sputtering systems and can support continuous target rotation and efficient utilization of the target material.

For large-area coating processes, rotary target systems can be particularly useful where stable deposition conditions, long operating cycles and effective target utilization are important.

The appropriate target structure depends on the sputtering equipment, power configuration, coating process and required film properties.

Quality Control

VIMATERIAL maintains quality control throughout the manufacturing process, from raw material selection to finished target inspection.

Key parameters can include:

• Chemical purity and composition
• Target dimensions and geometry
• Density
• Crystal structure
• Surface condition
• Bonding quality, where applicable

Inspection records can be maintained for product traceability. Third-party inspection can also be arranged upon request according to project requirements.

Packaging & Storage

Silicon rotary targets are vacuum-sealed with protective inner packaging and packed in customized high-strength wooden crates to reduce the risk of contamination and mechanical damage during transportation.

Store in a clean, dry and well-ventilated environment at room temperature, protected from moisture, corrosive gases, excessive heat and mechanical impact. Keep the original packaging intact until the target is ready for installation.

FAQs

Q1. What purity grades of silicon rotary targets do you provide?

VIMATERIAL supplies 99.9%, 99.95% and up to 99.999% purity silicon rotary targets. The available purity depends on the target manufacturing and bonding configuration.

Q2. What is the difference between sprayed and bonded silicon tube targets?

Sprayed silicon tube targets are manufactured using a coating/spraying process and are available in 99.9% and 99.95% purity. Bonded silicon tube targets use a bonding process to connect the silicon target with the corresponding backing assembly and are available up to 99.999% purity.

Q3. Can silicon rotary targets be customized?

Yes. We can customize the diameter, length, wall thickness, target geometry, purity and bonding configuration according to your drawings and sputtering equipment.

Q4. Do you provide target bonding?

Yes. VIMATERIAL provides target bonding services for suitable silicon rotary target configurations. Please provide the target dimensions and backing tube/cathode requirements for technical evaluation.

Q5. What information is required for a quotation?

Please provide the purity, target type, outer diameter, inner diameter, length, wall thickness, quantity, sputtering system and bonding requirements. A technical drawing is preferred for customized targets.