1. Molybdenum Silicide sputtering targets Description
High-purity
Molybdenum Silicide sputtering targets provided by VIMATERIAL are suitable for PVD coating, optical thin films, and semiconductor devices. These high-density, high-purity molybdenum silicon targets ensure uniform thin film deposition and high-temperature stability.
2. Product Overview of Molybdenum Silicide sputtering targets
VIMATERIAL’s MoSi₂ (molybdenum silicide) sputtering targets are manufactured using high-purity raw materials and advanced high-temperature sintering processes, ensuring uniform deposition and long-term stability. These targets are suitable for PVD coating, optical thin films, semiconductor devices, and the production of high-temperature wear-resistant materials.
Purity: ≥99.9%
Density: ≥99% theoretical density
Specifications: Round and square targets, customizable thickness
Form: Uniform particles pressed and molded
3. Technical Specifications
| Parameter |
Description |
| Chemical formula |
MoSi₂ |
| Impurity content |
Fe, Ni, Cu < 50 ppm |
| Density |
≥7.0 g/cm³ |
| Good conductivity |
suitable for high-temperature coating |
| Process |
Cold isostatic pressing + high-temperature sintering |
| Shape |
Round and square targets, customizable thickness |
| Crystal Structure |
Hexagonal close-packed |
| Bonding Backplane |
Customizable |
4.Applications
PVD optical coating: High purity ensures uniform thin film
Semiconductor devices: Suitable for high-temperature deposition of chip and electrode materials
High-temperature wear-resistant material: Suitable for coating preparation in extreme environments
Research and experimentation: Suitable for materials science and thin film development
5. Product Advantages
High purity and high density: Ensure film uniformity and stable performance.
High-temperature stability: Suitable for PVD high-temperature coating processes.
Customizable shapes: Round and square targets, with custom thicknesses available.
Low impurities: Extremely low Fe, Ni, and Cu content, improving film quality.
Long-term and stable supply: Strict quality control ensures product consistency.
6. Frequently Asked Questions
Q1: What coating processes are MoSi₂ sputtering targets suitable for?
A1: Primarily suitable for PVD, magnetron sputtering, and optical thin film deposition, ensuring film uniformity and high-temperature stability.
Q2: Can target dimensions be customized?
A2: Yes, round and square targets, as well as thicknesses, can be customized to meet customer requirements.
Q3: What is the impurity content?
A3: Our MoSi₂ targets have extremely low impurities, with Fe, Ni, and Cu content less than 50 ppm, ensuring high-purity coating results.
Q4: What are the advantages of MoSi₂ targets?
A4: High purity, high density, uniform deposition, high-temperature stability, and customizable shapes available.
7. Packaging & Shipping
Packaging
Each MoSi₂ target is encapsulated in high-quality shock-absorbing foam, antistatic material, and custom packaging to protect it from impact and moisture.
We provide specialized packaging for different target sizes (round and square) to ensure safe transportation. We offer a variety of shipping options: land, air, or express delivery to meet diverse customer needs.
Storage
To maintain the stability and performance of MoSi₂ targets, they should be stored in a dry, constant-temperature environment. Avoid prolonged exposure to air and take protective measures to prevent moisture, damage, and contamination.
8. Usage Recommendations
To ensure optimal performance of MoSi₂ targets, inspect their surfaces for cracks and contamination before installation. Maintain stable ambient temperature and pressure during coating, and ensure that the equipment is compatible with the target. Regularly clean the target surface and conduct prompt inspection and maintenance of the equipment to ensure efficient operation.
9. Processing Services
VIMATERIAL offers custom MoSi₂ targets, precision cutting, and processing services to ensure they meet customer dimensional and surface requirements. For targets requiring a high finish, we also offer precision grinding services to ensure a smooth surface suitable for high-precision coating processes.
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