Zirconium Oxide sputtering target is a kind of ceramic target with zirconium oxide as the main component, which has the characteristics of high melting point, high hardness, and good chemical stability, and is used in magnetron sputtering and other coating technologies to prepare high-quality thin film materials.
VIMATERIAL offers high-purity zirconia targets, custom sizes available upon request. Contact us for more information.
Chemical formula: ZrO2
Melting point: approx. 2700°C.
Boiling point: about 4300℃.
Density: Theoretical density 5.68g/cm3.
Hardness: Mohs hardness is about 7.
Chemical properties: high chemical stability, at room temperature is not easy to react with water, acid, alkali and other substances, but at high temperatures, strong acid and alkali and other specific conditions may be chemical reactions.
Electrical properties: Generally speaking, zirconium oxide has a relatively high resistivity, but its electrical conductivity can be effectively improved by means of doping and other means to meet the requirements of magnetron sputtering and other electrically driven sputtering process.
Optical properties: zirconia film has good optical transmittance and refractive index, can be used for the preparation of optical films, permeation enhancement film, interference film, etc..
Crystalline phase structure: Zirconium Oxide has three crystalline phases, namely monoclinic phase (below 1170°C), tetragonal phase (1170°C-2370°C) and cubic phase (above 2370°C).
Electronics: Used in semiconductors, displays, and photovoltaic devices for high-k dielectric films, transparent conductive layers, and improved efficiency and stability.
Optics: Applied in optical and laser coatings to enhance light control, durability, and thermal stability.
Energy: Utilized in SOFC electrolytes and lithium-ion batteries to improve ionic conductivity, performance, and cycle life.
Medical: Suitable for dental restorations and medical device coatings due to excellent biocompatibility, hardness, and antibacterial properties.
Industrial: Employed in wear-resistant, thermal barrier, and decorative coatings to enhance durability, heat resistance, and surface performance.
Request a Quote: Contact us to receive a quote for your required zirconium oxide quantity and specifications.
Order a Sample: We offer the option to request a sample to ensure it meets your specific needs.
Fast & Secure Delivery: We provide fast, secure packaging and delivery to ensure your zirconium oxide reaches you safely.
| Zirconium metal | Zirconium Carbide | Zirconium Nitride |
| Zirconia Powder | Zirconia Granules | Zirconia Pellets |
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
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