Zirconium metal

Zirconium metal sputtering target is a kind of sputtering target with the chemical formula of Zr. It has the physical and chemical properties of high melting point and high boiling point, good chemical stability, moderate hardness and toughness, and good electrical and thermal conductivity, etc. It has important applications in the manufacturing of electronic devices, optics and optoelectronics, decorative and protective coatings, and energy fields.

Properties

Chemical formula: Zr

CAS No.: 7440-67-7

High melting point and boiling point: The melting point of zirconium metal is about 1852℃, and the boiling point is up to 4377℃, which makes the zirconium sputtering target able to withstand high energy input in the sputtering process and maintain a stable physical state, and it is not easy to melt or volatilize, so as to ensure that the sputtering process continues to carry out steadily and stably, which is conducive to the preparation of uniform, high-quality thin films.

Good chemical stability: zirconiummetal has good resistance to most chemicals at room temperature and is not easily oxidized or corroded. In the sputtering process, even if exposed to a certain vacuum environment and the possible existence of a small amount of reactive gases, but also to maintain good chemical stability, reduce the film contamination or performance degradation due to chemical reactions, help to ensure the purity and performance of the prepared film.

Moderate hardness and toughness: zirconium metal has a certain degree of hardness and good toughness, not only in the ion bombardment to keep the target surface relatively flat, reduce the target surface damage caused by sputtering and particle spattering, but also avoid the target is too brittle and hard in the sputtering process to produce cracks or crushing, to prolong the service life of the target material, and to improve the stability and reliability of sputtering process.

Good electrical and thermal conductivity: zirconium’s electrical and thermal conductivity is good, in the sputtering process, good electrical conductivity helps to uniformly transmit the current, so that the ions can be more evenly bombarded on the surface of the target, thus improving the uniformity and quality of the film. At the same time, the good thermal conductivity can emit the heat generated during the sputtering process in a timely manner, preventing local overheating of the target material and further ensuring the stability of the sputtering process and the performance of the target material.

Applications

Electronic device manufacturing: In the field of integrated circuits, semiconductor devices and other electronic fields, zirconium metal sputtering targets can be used for the preparation of metal interconnects, electrodes, barrier layers and other thin film structures. Its good conductivity and chemical stability help to improve the performance and reliability of electronic components, reduce contact resistance, reduce signal transmission delay, thereby improving the operating speed and stability of integrated circuits to meet the requirements of modern electronic devices for high performance and high integration.

Optics and optoelectronics field: it can be used for the preparation of optical films, such as metal reflective layers or functional films in mirrors, filters, optical sensors and so on. Through sputtering coating technology, zirconium metal is deposited on the surface of optical components, which can realize the regulation of light reflection, transmission, absorption and other characteristics, and improve the performance of optical components, which are widely used in the fields of laser technology, optical communication, display technology, etc., to improve the imaging quality of optical systems and the efficiency of optical signal transmission.

Decorative and protective coatings: Zirconium metal sputtering targets can be used to prepare decorative or protective coatings on the surface of metals, ceramics, glass and other materials. Zirconium metal coating has good corrosion resistance, abrasion resistance and oxidation resistance, which can improve the surface hardness and decorative effect of the material, and at the same time, it can also give the material some special properties, such as antimicrobial, self-cleaning and so on, which is widely used in the fields of jewelry, watches, architectural and decorative materials, automotive parts and so on, to improve the quality of the product and the added value.

Energy field: In new energy fields such as solar cells and lithium-ion batteries, zirconium metal sputtering targets can be used to prepare thin film coatings for battery electrodes, collectors and other components. Its good electrical conductivity and chemical stability help to improve the charging and discharging performance, cycle life and safety of the battery, optimize the performance of the battery, promote the development of new energy technology, and provide support for solving energy problems.