Zirconium Carbide

Zirconium Carbide sputtering target is a ceramic compound sputtering target with high melting point, high hardness and good chemical stability, which is mainly used in the fields of electronics, optics, hard coatings and energy.

Properties

Chemical formula: ZrC

Molecular weight: 103.23

CAS No.: 12070-14-3

High melting point: the melting point is about 3540℃, which makes it able to withstand high temperature and maintain a stable physical state during high temperature sputtering, not easy to melt or deformation, thus ensuring the uniformity and stability of sputtering coating.

High hardness: The hardness is second only to a few super-hard materials such as diamond, with excellent wear resistance. During the sputtering process, the surface of the target material is not easy to be bombarded by ions to produce obvious craters or wear, which can effectively resist the erosion of sputtering ions and prolong the service life of the target material, and at the same time, help to improve the hardness and abrasion resistance of the prepared film.

Good chemical stability: at room temperature, most acids, alkalis, salts and other chemicals have strong corrosion resistance, not easy to chemical reaction. Even at high temperatures, it has good resistance to some oxidizing atmospheres, and is able to maintain the stability of its structure and performance in various chemical environments, ensuring that the sputtering process will not affect the quality and performance of the film due to chemical reactions with the surrounding environment.

Excellent electrical and thermal conductivity: Its good electrical conductivity makes it possible to better control the ion bombardment and film deposition rate during the sputtering process, which is conducive to the preparation of high-quality conductive films. At the same time, the excellent thermal conductivity can make the target material in the ion bombardment heat, can be quickly emitted heat out, to avoid localized overheating caused by the target material damage or film performance degradation.

Application

Electronic devices: Zirconium Carbide is used in the preparation of electrodes, wiring, thin film resistors and other components in electronic devices. Its good conductivity and chemical stability can improve the performance and reliability of electronic devices and extend the service life of the devices. For example, it can be used as the material of metallization layer in the manufacture of integrated circuits to provide a good electrical connection between electronic components.

Optical field: Zirconium Carbide can be used for the preparation of optical films, such as transmittance enhancement film, reflective film, and filter film. By adjusting the sputtering process parameters, the thickness and refractive index of the film can be controlled, thus realizing the regulation of the characteristics of light reflection, transmission and absorption to meet the needs of different optical devices, such as optical lenses, displays, solar cells and so on.

Hard coating field: Due to its high hardness and wear resistance, Zirconium Carbide can be used to prepare hard coatings on the surfaces of cutting tools, molds, mechanical parts, etc., which can improve the surface hardness, wear resistance and corrosion resistance of these parts, extend their service life, and reduce the production cost.

Energy field: Zirconium Carbide is also used in energy storage and conversion devices, such as lithium-ion batteries and fuel cells. It can be used as electrode material or coating material of battery diaphragm to improve the performance and safety of the battery, and increase the charging and discharging efficiency and cycle life of the battery.