Yttrium Oxide

Yttrium Oxide sputtering target is a kind of ceramic sputtering target with yttrium oxide as the main component, which has the characteristics of high purity, high melting point and good chemical stability, and is widely used in the fields of optics, electronics, magnetism and so on.

Characteristics

Chemical formula: Y₂O₃

High melting point: Yttrium oxide has a high melting point, which makes it able to withstand high energy bombardment in the sputtering process without easy melting and deformation, ensuring the stability of the sputtering process and the service life of the target material.

Chemical stability: at room temperature and pressure, yttrium oxide has good chemical stability and is not easy to react with other substances, so it will not introduce impurities during the sputtering process, which ensures the purity and performance of the prepared film.

Good electrical and thermal conductivity: It has a certain degree of electrical and thermal conductivity, which helps to better control the generation of plasma and the emission of heat during the sputtering process, thus improving the sputtering efficiency and the quality of the film.

Applications

Optical field: Used for the preparation of optical films, such as high refractive index films, anti-reflective films and so on. Yttrium oxide film has good optical properties, can improve the transmittance, reflectivity and refractive index of optical components and other properties, widely used in optical lenses, laser devices, optical communications and other fields .

Electronic field: It can be used to prepare electronic films, such as insulating films and conductive films. In semiconductor devices, yttrium oxide film can be used as an insulating layer or buffer layer to improve the performance and reliability of the device; in electronic displays, yttrium oxide film can be used as an additive for transparent conductive film to improve the conductivity and stability of the film.

Magnetism: It is one of the important materials for the preparation of magnetic films, such as yttrium iron garnet (YIG) films, etc. YIG films have excellent magneto-optical and microwave properties, and are widely used in magneto-optical storage, microwave communications, sensors and other fields.

Other fields: It can also be used in high-temperature superconductivity, catalysts, ceramic coatings and other fields.

In the field of high-temperature superconductivity, yttrium oxide can be used as the matrix or dopant of superconducting materials to improve the performance of superconducting materials;

In the field of catalysts, yttrium oxide can be used as the carrier or active component of catalysts to improve the activity and selectivity of catalysts;

In the field of ceramic coatings, yttrium oxide can be used as a coating material to improve the hardness, wear resistance and corrosion resistance of ceramic materials.