| Product ID | Formula | Purity | Dimension | Quantity | Price in € | Inquiry |
|---|---|---|---|---|---|---|
| 730700ST001 | TaN | 99.5% | Ø 25.4 mm x 6.35 mm | 1 | POR | Inquire |
| 730700ST002 | TaN | 99.5% | Ø 50.8 mm x 3.175 mm | 1 | POR | Inquire |
| 730700ST003 | TaN | 99.5% | Ø 76.2 mm x 3.175 mm | 1 | POR | Inquire |
| 730700ST004 | TaN | 99.5% | Ø 101.6 mm x 6.35 mm | 1 | POR | Inquire |
| 730700ST005 | TaN | 99.5% | Ø 203.2 mm x 6.35 mm | 1 | POR | Inquire |
Tantalum nitride targets are an important tool for the preparation of thin film materials.
Basic information:
Chemical composition: the main component is tantalum nitride (TaN), composed of tantalum (Ta) and nitrogen (N) elements.
Crystal structure: Generally hexagonal crystal structure, the lattice constant will vary depending on the preparation process and conditions.
Appearance: Usually appears as a yellow-brown lumpy solid, after fine processing, the surface is relatively flat and smooth.
Density: Relatively high density, about 14.36g/cm³.
Hardness: high hardness, with good abrasion resistance and scratch resistance.
Melting point: melting point up to 3090°C, with excellent high temperature resistance.
Application areas:
Semiconductor industry: In semiconductor manufacturing, it is used in physical vapour deposition (PVD) and chemical vapour deposition (CVD) processes to prepare conductive thin films, barrier layers, etc., e.g., it plays the role of connecting circuits and preventing the diffusion of metal ions in integrated circuits.
Optical field: It is used to prepare optical films, such as anti-reflective film, transmittance enhancement film, etc., which can improve the performance of optical components and increase the resolution and transmittance of optical systems.
Electronic component field: It can be used to manufacture electronic components such as chip resistors, and Tantalum Nitride resistors can resist the erosion of water vapour and increase the stability of electronic components.
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
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