| Product ID | Formula | Purity | Dimension | Quantity | Price in € | Inquiry |
|---|---|---|---|---|---|---|
| 730600ST001 | TaC | 99.5% | Ø 25.4 mm x 6.35 mm | 1 | POR | Inquire |
| 730600ST002 | TaC | 99.5% | Ø 50.8 mm x 3.175 mm | 1 | POR | Inquire |
| 730600ST003 | TaC | 99.5% | Ø 76.2 mm x 3.175 mm | 1 | POR | Inquire |
| 730600ST004 | TaC | 99.5% | Ø 101.6 mm x 6.35 mm | 1 | POR | Inquire |
| 730600ST005 | TaC | 99.5% | Ø 203.2 mm x 6.35 mm | 1 | POR | Inquire |
Tantalum carbide sputtering target is a high-temperature ceramic material composed of tantalum and carbon. TaC is characterized by its extremely high hardness, high melting point, high density and good electrical conductivity, making it suitable for demanding PVD sputtering applications where high-temperature stability, wear resistance and surface protection are required.
VIMATERIAL supplies tantalum carbide sputtering targets for semiconductor, optical, hard coating and high-temperature applications. Target dimensions, shapes and other specifications can be customized according to customer requirements. We can also provide target bonding services for suitable target designs. Please contact us for customized specifications or experimental requirements.
| Property | Specification |
| Chemical Composition | Tantalum Carbide (TaC) |
| Appearance | Grey-black |
| Mohs Hardness | About 9–10 |
| Melting Point | About 3880°C |
| Density | Generally above 14 g/cm³ |
| Electrical Properties | Good electrical conductivity |
TaC has a high hardness comparable to that of other ultra-hard ceramic materials and maintains excellent stability at elevated temperatures. Its high density also provides good mechanical stability during target handling and sputtering processes.
Our products are manufactured and inspected under a strict quality management system. Inspection standards are applied throughout incoming material inspection, processing, final inspection and factory inspection. Non-conforming materials are strictly isolated to prevent them from entering subsequent processes. Samples can be provided for customer re-inspection according to specific requirements.
Tantalum Carbide Sputtering Targets are securely packed to protect the target surface and edges during transportation. Vacuum packaging and protective outer packaging can be provided according to target size and customer requirements.
Store in a dry, cool and well-ventilated environment, protected from moisture and corrosive substances. During handling and transportation, avoid collision, impact, friction and other physical damage to the target surface.
A Tantalum Carbide Sputtering Target is a TaC-based ceramic target used primarily in PVD sputtering processes to deposit functional, protective or hard TaC-containing thin films onto substrates.
TaC sputtering targets can be used in semiconductor-related thin-film processes, optical coatings, hard protective coatings and selected high-temperature and aerospace applications.
Yes. VIMATERIAL can provide customized TaC sputtering targets according to customer drawings and application requirements. Target dimensions, shapes and other technical specifications can be discussed based on the specific sputtering equipment.
Yes. Target bonding services are available for suitable TaC sputtering target designs. The bonding method and configuration can be discussed according to the target structure, backing plate and sputtering equipment.
It can be supplied in different shapes and dimensions depending on the sputtering system and application. Custom targets can be considered based on technical drawings or detailed dimensional requirements.
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
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