Catalogries

Chemical Name:
Tantalum Carbide
Formula:
TaC
Product No.:
730600
CAS No.:
12070-06-3
EINECS No.:
235-118-3
Form:
Sputtering Target
HazMat:
Product ID Formula Purity Dimension Quantity Price in € Inquiry
730600ST001 TaC 99.5% Ø 25.4 mm x 6.35 mm 1 POR Inquire
730600ST002 TaC 99.5% Ø 50.8 mm x 3.175 mm 1 POR Inquire
730600ST003 TaC 99.5% Ø 76.2 mm x 3.175 mm 1 POR Inquire
730600ST004 TaC 99.5% Ø 101.6 mm x 6.35 mm 1 POR Inquire
730600ST005 TaC 99.5% Ø 203.2 mm x 6.35 mm 1 POR Inquire
Product ID
730600ST001
Formula
TaC
Purity
99.5%
Dimension
Ø 25.4 mm x 6.35 mm
Quantity
1
Price in €
POR
Product ID
730600ST002
Formula
TaC
Purity
99.5%
Dimension
Ø 50.8 mm x 3.175 mm
Quantity
1
Price in €
POR
Product ID
730600ST003
Formula
TaC
Purity
99.5%
Dimension
Ø 76.2 mm x 3.175 mm
Quantity
1
Price in €
POR
Product ID
730600ST004
Formula
TaC
Purity
99.5%
Dimension
Ø 101.6 mm x 6.35 mm
Quantity
1
Price in €
POR
Product ID
730600ST005
Formula
TaC
Purity
99.5%
Dimension
Ø 203.2 mm x 6.35 mm
Quantity
1
Price in €
POR

Tantalum carbide sputtering target is a high-temperature ceramic material composed of tantalum and carbon. TaC is characterized by its extremely high hardness, high melting point, high density and good electrical conductivity, making it suitable for demanding PVD sputtering applications where high-temperature stability, wear resistance and surface protection are required.

VIMATERIAL supplies tantalum carbide sputtering targets for semiconductor, optical, hard coating and high-temperature applications. Target dimensions, shapes and other specifications can be customized according to customer requirements. We can also provide target bonding services for suitable target designs. Please contact us for customized specifications or experimental requirements.

Basic information

Property Specification
Chemical Composition Tantalum Carbide (TaC)
Appearance Grey-black
Mohs Hardness About 9–10
Melting Point About 3880°C
Density Generally above 14 g/cm³
Electrical Properties Good electrical conductivity

TaC has a high hardness comparable to that of other ultra-hard ceramic materials and maintains excellent stability at elevated temperatures. Its high density also provides good mechanical stability during target handling and sputtering processes.

Applications of Tantalum Carbide Sputtering Targets

  • Semiconductor Industry: Tantalum Carbide Sputtering Targets can be used in PVD processes for depositing functional TaC-containing thin films and protective layers in semiconductor-related applications. Their high-temperature stability, hardness and chemical resistance make them suitable for demanding thin-film processes.
  • Optical Coatings: TaC targets can be used in selected optical coating systems to prepare functional thin films for optical components. Depending on the film structure and deposition process, TaC-based coatings can provide surface protection and contribute to the required optical and mechanical properties.
  • Hard Coatings: Due to its high hardness and wear resistance, tantalum carbide is suitable for hard and protective coating applications. TaC-based coatings can be deposited on selected cutting tools, moulds and engineering components to improve surface durability and resistance to wear under demanding conditions.
  • Aerospace and High-Temperature Applications: TaC is an ultra-high-temperature ceramic material with excellent thermal stability. TaC sputtering targets can be used to prepare protective or functional coatings for components exposed to high-temperature environments, including selected aerospace and advanced engineering applications.

Quality Control

Our products are manufactured and inspected under a strict quality management system. Inspection standards are applied throughout incoming material inspection, processing, final inspection and factory inspection. Non-conforming materials are strictly isolated to prevent them from entering subsequent processes. Samples can be provided for customer re-inspection according to specific requirements.

Packaging and Storage

Tantalum Carbide Sputtering Targets are securely packed to protect the target surface and edges during transportation. Vacuum packaging and protective outer packaging can be provided according to target size and customer requirements.

Store in a dry, cool and well-ventilated environment, protected from moisture and corrosive substances. During handling and transportation, avoid collision, impact, friction and other physical damage to the target surface.

FAQs

Q1. What is a Tantalum Carbide Sputtering Target?

A Tantalum Carbide Sputtering Target is a TaC-based ceramic target used primarily in PVD sputtering processes to deposit functional, protective or hard TaC-containing thin films onto substrates.

Q2. What is Tantalum Carbide Sputtering Target used for?

TaC sputtering targets can be used in semiconductor-related thin-film processes, optical coatings, hard protective coatings and selected high-temperature and aerospace applications.

Q3. Can VIMATERIAL provide customized TaC sputtering targets?

Yes. VIMATERIAL can provide customized TaC sputtering targets according to customer drawings and application requirements. Target dimensions, shapes and other technical specifications can be discussed based on the specific sputtering equipment.

Q4. Does VIMATERIAL provide TaC target bonding services?

Yes. Target bonding services are available for suitable TaC sputtering target designs. The bonding method and configuration can be discussed according to the target structure, backing plate and sputtering equipment.

Q5. What shapes and sizes of TaC sputtering targets are available?

It can be supplied in different shapes and dimensions depending on the sputtering system and application. Custom targets can be considered based on technical drawings or detailed dimensional requirements.

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QUALITY ASSURANCE

VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.

Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.

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