Rhenium metal

Rhenium metal sputtering target is a key material made of high purity rhenium metal, which is used in the physical vapour deposition (PVD) technique to form thin rhenium films with specific functions by sputtering its atoms through ion bombardment and depositing them on the surface of the substrate material.

Properties

Density: Theoretical density of 21.02g/cm³, belongs to the high-density metal, high-density characteristics help to maintain the stability and uniformity of the target material in the sputtering process, reduce the spattering of particles in the sputtering process, so as to improve the quality of the film.

Melting point: up to 3180 ℃ (also shown as 3186 ℃), is in addition to tungsten melting point of one of the highest metal. The high melting point makes rhenium sputtering target able to withstand high energy input during sputtering, not easy to melt or deform, which ensures the stability of sputtering and the service life of the target.

Colour / Appearance: Rhenium metal is greyish-white in colour and has a metallic luster.

Hardness: Mohs hardness is 7.0, high hardness, which makes it have better wear resistance and deformation resistance, and can maintain good shape and dimensional accuracy in the sputtering process.

Thermal conductivity: the thermal conductivity is 48W/m・K, good thermal conductivity can effectively transfer the heat generated in the sputtering process to avoid local overheating, thus reducing the thermal damage and deformation of the target material.

Coefficient of Expansion: The coefficient of thermal expansion is 6.2×10-⁶/K. The relatively low coefficient of thermal expansion makes the size change of the target material small when the temperature changes, which is conducive to maintaining the uniformity and stability of the sputtered film.

Stability: It is more stable in air below 1000℃, but it is easy to react with oxygen at high temperature, so care should be taken to avoid high temperature and oxygen contact during storage and use.

Solubility: Rhenium metal is soluble in nitric acid and oxidised to rhenium acid, gradually soluble in sulphuric acid, but almost insoluble in hydrochloric acid and hydrofluoric acid.

Purity: generally 99.9% and above, high purity rhenium sputtering target can reduce the impact of impurities on the performance of sputtered film, improve the purity and quality of the film.

Electrical properties: Rhenium metal has good electrical conductivity, which is very important for sputtering coating in the field of electronics, semiconductors, etc., to ensure the electrical properties of sputtered films.

Applications

Electronics and semiconductor industry:
Integrated Circuit Manufacturing: In the manufacturing process of semiconductor chips, metal sputtering is used to prepare interconnect lines and barrier films, etc. As the chip process continues to shrink, the sputtering target is more and more demanding, rhenium metal sputtering target because of its high purity, good electrical conductivity and thermal conductivity and other characteristics, to meet the needs of advanced processes, to help create a better performance, higher integration of the chip.

Electronic control devices: such as field effect transistors (FETs) and other electronic devices in the manufacture, used in the device surface to form a conductive layer or electrodes and other structures, the performance and reliability of the device plays an important role.

Flat panel display field: in liquid crystal display (LCD), organic light-emitting diode display (OLED) and other flat panel display technology, rhenium sputtering target can be used to prepare transparent conductive film, electrodes and other components. For example, in OLED display, high-quality electrode material has a key role in improving the display effect, reducing power consumption, etc. Rhenium target can provide high-quality coating material for flat panel display, enhance the uniformity of large-area film layer in flat panel display, improve productivity and reduce costs.

Aerospace field:
High-temperature parts coating: Aerospace engines and other high-temperature parts need to have good high-temperature resistance, oxidation and corrosion resistance. The coating prepared using rhenium sputtering target can improve the high temperature resistance of components, reduce wear and corrosion in high temperature environment, extend the service life of components, and is of great significance to improve the performance and reliability of the aero-engine.
Satellite components: in some key components of the satellite, such as the electrode of solar panels, electronic equipment shell, etc., will also use rhenium sputtering target to prepare functional thin film coatings to meet the special requirements of satellites in the space environment, such as anti-radiation, high conductivity and so on.

Energy field:
Solar cells: In the manufacture of thin film solar cells, rhenium sputtering target can be used to prepare the back electrode, absorption layer and other key components. Its good conductivity and stability help to improve the photoelectric conversion efficiency and stability of solar cells.
Fuel cells: The electrode materials in fuel cells need to have good catalytic properties and conductive properties. The electrode coating prepared by rhenium metal or its compounds as a sputtering target can improve the performance and efficiency of fuel cells and reduce costs.

Optical field:Optical Coating: Rhenium metal can be used to make optical lenses, filters and other optical components coating. The rhenium film formed on the surface of the optical element by sputter coating technology can change the reflectivity, transmittance and other optical properties of the optical element to achieve specific optical functions, such as anti-reflection, transmission enhancement, beam splitting and so on.
Laser devices: In laser generators and other laser devices, it is used to prepare the coating of laser mirrors, resonant cavities and other components to improve the performance and stability of laser devices.

Other fields:
High-temperature corrosion-resistant materials: in some industrial environments that require high temperature and corrosion resistance of materials, such as the chemical and petroleum industries, coatings prepared by rhenium sputtering targets can be used to protect equipment and components and improve their service life.
High-grade decorative items: the use of rhenium sputtering target can be prepared on the metal or non-metal surface with special appearance and performance of decorative coatings, such as metal luster, wear-resistant, corrosion-resistant coating for high-grade jewellery, watches, handicrafts and other surface decoration.