Niobium Molybdenum Tantalum Alloy sputtering target is a kind of alloy sputtering target composed of Niobium, Molybdenum and Tantalum with high melting point, corrosion resistance, high strength and hardness, and excellent electrical properties, which is suitable for electronic device manufacturing, optical thin film preparation and other fields.
Characteristics
Chemical formula: NbMoTa
Density: Niobium Molybdenum Tantalum Alloy density is generally at a high level, such as molybdenum density of about 10.22g/cm³, niobium density of about 8.57g/cm³, tantalum density of about 16.65g/cm³, the density of the alloy will be due to the proportion of the different components in a certain range of changes, the higher density of the target in the sputtering process to make the target better able to withstand ion bombardment. Higher density makes the target better able to withstand ion bombardment during sputtering and maintains structural stability.
Melting point: the melting point of niobium is about 2468℃, molybdenum is about 2610℃, tantalum is about 2996℃, the alloy has a high melting point, so it can adapt to the high temperature sputtering environment, it is not easy to melt or deformation in the sputtering process, which ensures the stability and repeatability of the sputtering process.
Hardness: The hardness of the alloy is high, for example, the hardness of pure molybdenum is about 5.5-6.0 Mohs, the hardness of pure tantalum is about 6.5 Mohs, and the hardness of niobium is also relatively high, this high hardness makes the target material resistant to the impact of ions during sputtering, reduces the abrasion and erosion of the surface of the target material, and prolongs the service life of the target material.
Coefficient of thermal expansion: The coefficient of thermal expansion of niobium is about 7.1×10-⁶/°C, that of molybdenum is about 5.8×10-⁶/°C, and that of tantalum is about 6.5×10-⁶/°C. The alloys have relatively low coefficients of thermal expansion, and they can maintain good dimensional stability when the temperature changes. This is critical for sputtering processes that require precise control of film thickness and uniformity.
Conductivity: Niobium, molybdenum and tantalum all have good electrical conductivity, and the alloys also have high conductivity, which enables them to efficiently transmit current and generate stable plasma, thus realizing high-quality thin film deposition to meet the stringent requirements for thin film electrical properties of electronic devices and so on.
Applications
Manufacture of electronic devices: In the manufacture of integrated circuits, semiconductor devices and other electronic components, Niobium Molybdenum Tantalum Alloy is used to deposit metal thin films for electrodes, interconnections, etc., which improves the performance and reliability of the electronic devices, and meets their needs for high-precision, high-performance films.
Optical film preparation: Niobium Molybdenum Tantalum Alloy can be used for the preparation of optical lenses, displays and other surfaces of optical films, such as transmittance enhancement film, reflective film, etc., by adjusting the composition of the alloy and the parameters of the sputtering process, you can obtain a specific optical properties of the film to improve the optical components of the transmittance, reflectivity and other performance indicators.
Wear-resistant coatings and protective coatings: Niobium Molybdenum Tantalum alloy films are deposited on the surfaces of mechanical parts, cutting tools, etc., to form wear-resistant and corrosion-resistant protective coatings, improve the service life and performance of the parts, and reduce the damage caused by wear and corrosion on the materials.
High-temperature alloy coating: Niobium Molybdenum Tantalum Alloy is used on the surface of high-temperature alloy parts in aerospace, energy and other fields to form coatings with high-temperature oxidation and corrosion resistance, to protect the stability of the performance of the base material in a high-temperature environment and extend the service life of the parts.
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
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