Lanthanum Zirconium Oxide

Lanthanum zirconium oxide sputtering target is a kind of ceramic material used in magnetron sputtering and other coating technologies, with high thermal and chemical stability and good film-forming properties, it can be used to prepare high-quality thin films, and it has a wide range of applications in the fields of semiconductors, optics and electronics.

Characteristic

High melting point: Lanthanum zirconium oxide has a high melting point, which makes it able to withstand higher temperatures in the sputtering process, and is not easy to melt or deform, which ensures the stability of sputtering and the service life of the target material.

High density: usually high density, high density helps to improve the sputtering efficiency of the target and the quality of the film, can make the sputtered particles more uniformly deposited on the substrate, the formation of dense, uniform film.

Good crystallinity: Lanthanum zirconium oxide has good crystallinity, and the integrity of the crystalline structure affects the structure and properties of the sputtered film. Good crystallinity enables sputtered films to have better crystal structure and electrical and optical properties.

High purity: generally need to have high purity, high purity target can reduce the impact of impurities on the performance of sputtered film, to ensure the quality of the film and performance stability.

Good chemical stability: under conventional environmental conditions, lanthanum zirconium oxide has good chemical stability and is not easy to have chemical reactions with other substances. However, during the sputtering process, under the action of specific atmosphere and energy, sputtering reaction will occur to form thin films.

Good sputtering rate: A moderate sputtering rate ensures that enough material is sputtered to form a thin film during the sputtering process, while the quality of the film is not affected by a high sputtering rate that results in too fast a growth rate.

Good uniformity: During the sputtering process, a uniform distribution of sputtered particles is produced, resulting in a good uniformity of the deposited film, which is very important for applications that require high film uniformity.

Applications

Solid State Batteries: Lanthanum zirconium oxide can be used to prepare solid electrolyte films for solid state batteries. Solid-state batteries have received widespread attention for their high safety and high energy density, etc. Lanthanum Zirconium Oxide sputtering targets can provide high-quality electrolyte films for solid-state batteries, improving the performance and safety of the batteries.

Fuel Cell: In fuel cell, it can be used to prepare electrode or electrolyte related thin film materials, which helps to improve the efficiency and stability of fuel cell.

Optical films: Lanthanum zirconium oxide can be used to manufacture various optical films, such as transmittance enhancement films, reflective films, and filter films. These optical films are widely used in optical devices, laser devices, solar cells and other fields, and can improve the performance and efficiency of optical devices.

Transparent conductive films: Through doping and other means, transparent films with certain conductivity can be prepared, which are used as transparent conductive layers for touch screens, flat panel displays and other electronic devices.

Semiconductor devices: can be used in the manufacture of semiconductor devices, such as in integrated circuits to prepare insulating layers, barrier layers and other films, the performance and reliability of semiconductor devices play an important role.

Chip manufacturing: In the process of chip manufacturing, it can be used to deposit various functional films, such as dielectric layer, metal connection layer, etc., to provide support for high performance and miniaturisation of chips.

Wear-resistant coating: the prepared film has high hardness and wear resistance, which can be used to manufacture wear-resistant coatings, applied to the surface of mechanical parts, cutting tools, etc., to improve their wear resistance and service life.

Anti-corrosion coatings: In some corrosive environments, lanthanum zirconium oxide thin films can be used as anti-corrosion coatings to protect the substrate materials from corrosion and prolong the service life of the materials.