Fluorine doped Tin Oxide (FTO) sputtering targets are essential materials for producing transparent conductive oxide (TCO) thin films. By doping tin oxide (SnO₂) with fluorine, the electrical conductivity is significantly improved while maintaining high optical transparency. This makes FTO sputtering targets widely used in thin film solar cells, touch panels, displays, smart windows, and other optoelectronic devices.
At VIMATERIAL, we supply high-purity FTO sputtering targets with excellent stability, uniform thin film deposition, and customizable dimensions to meet research and industrial-scale demands.
| Item | Specification |
| Chemical Formula | SnO₂:F |
| Purity | 99.99% (4N) |
| Density | 6.95 g/cm³ (theoretical) |
| Crystal Structure | Rutile-type tetragonal (similar to SnO₂) |
| Form | Planar or rotary sputtering targets |
| Dimensions | Custom sizes and shapes available |
| Backing Plate | Bonded or unbonded on request |
| Sputtering Method | DC magnetron sputtering / RF magnetron sputtering |
Solar Cells : Transparent conductive layers in thin film and perovskite photovoltaics
Displays : Flat panel displays, LCDs, OLEDs, and touchscreens
Smart Windows : Low-E coatings and electrochromic glass
Optoelectronics : Transparent electrodes in sensors and devices
High electrical conductivity with excellent optical transparency
Stable sputtering rate and uniform thin film deposition
Available in 4N grades with strict impurity control
Customizable dimensions, bonding service, and shapes
Complete documentation and global technical support
Professional manufacturer of sputtering targets for TCO materials
Strict quality control with COA, TDS, MSDS provided
Strong R&D and application support for thin film deposition
Short lead time and flexible customization
Trusted by research institutes and industries worldwide
We offer purity 99.99% (4N) impurity-controlled grades for high-end applications.Purity can also be customized
Yes, we manufacture planar and rotary targets with or without backing plates, fully customizable.
Our FTO sputtering targets can be used in DC magnetron sputtering and RF magnetron sputtering systems.
ITO (Indium Tin Oxide) Sputtering Target
VI HALBLEITERMATERIAL GmbH (VIMATERIAL) employs a stringent quality assurance system to ensure the reliability of our product quality. Strict quality control is implemented throughout the entire production chain, and for defective products, we strictly enforce the principle of rework and redo. Each batch is released only after passing detailed specification tests.
Every batch of our materials is independently tested, and, if necessary, we send samples to certified companies for testing. We provide these documents and analysis certificates with the shipment to certify that our products meet the required standards.
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