Boron Nitride

Boron Nitride Sputtering Target is a material used in the sputtering process to deposit boron nitride (BN) films onto a substrate. Sputtering is a type of physical vapor deposition (PVD) where high-energy ions or particles strike a target, causing atoms or molecules from the target material to be ejected and deposited onto a substrate to form a thin film.

Physical Properties:

Chemical formula：BN

Molar mass：24.82 g/mol

Appearance：Boron nitride sputtering targets are typically white, solid disks or plates.

Density：2.1 (h-BN); 3.45 (c-BN) g/cm3

Melting point：2,973 °C (5,383 °F; 3,246 K) sublimates (cBN)

Solubility in water：insoluble

Purity: Sputtering targets are available in various purity grades, typically ranging from 99% to 99.99% for high-performance applications.

Electrical Insulation: Boron nitride is an excellent electrical insulator, which makes it ideal for applications that require electrical insulation along with high thermal conductivity.

Types of Boron Nitride Sputtering Targets:

Hexagonal Boron Nitride (h-BN):

This form is often used for creating lubricating or insulating thin films. It has a layered structure similar to graphite, allowing the deposition of thin films with lubricating properties.

Used for its high thermal conductivity and electrical insulating properties.

Common in applications like coatings for electronic devices, optical films, and as a protective coating in high-temperature environments.

Cubic Boron Nitride (c-BN):

Cubic boron nitride sputtering targets are used when the application demands hardness, such as in cutting tools, abrasive materials, and wear-resistant coatings.

This form of BN is the second hardest material known (after diamond), making it ideal for wear-resistant films in harsh conditions.

Applications:

Thin Film Deposition:

• Lubricating Coatings: Hexagonal boron nitride films are commonly used as lubricants in high-temperature environments, including in mechanical parts, mold coatings, and aerospace components.
• Dielectric Coatings: Boron nitride films are used as dielectric materials in electronic and semiconductor devices due to their excellent electrical insulating properties.

Optical Coatings: Boron nitride sputtering targets can be used in optical applications, such as in mirrors or coatings that need to withstand high temperatures while offering optical clarity.

Thermal Management: The high thermal conductivity of boron nitride makes it suitable for heat sink applications and other electronic components where heat dissipation is critical.

Wear-Resistant Coatings: Cubic boron nitride sputtering targets are used in the deposition of hard films for cutting tools, abrasive products, and protective coatings in automotive and manufacturing industries.

Neutron Reflectors: BN films are used in nuclear applications as neutron reflectors due to their low neutron absorption and high thermal stability.