Aluminum Oxynitride

Aluminum Oxynitride (AlON) Sputtering Target is a specialized target material used in physical vapor deposition (PVD) processes, particularly sputtering, to deposit thin films of AlON onto substrates. AlON sputtering targets are used in applications requiring hard, optically transparent, and thermally stable coatings, such as protective coatings on optical components, transparent armor, and other high-performance ceramics.

Chemical Composition and Structure:

Formula: AlON, consisting of aluminum, oxygen, and nitrogen atoms.

Solid Solution: Aluminum Oxynitride has a spinel-type crystal structure that contributes to its hardness and optical properties.

Purity: High-purity Aluminum Oxynitride is essential to prevent contamination in the deposited thin film, ensuring consistent optical and mechanical performance.

Physical Properties:

Appearance: Typically appears as a dense, solid disk or rectangular plate, depending on the sputtering system.

High Density and Hardness: Aluminum Oxynitride targets are hard and dense, which is beneficial for creating uniform, defect-free coatings.

Thermal Stability: Aluminum Oxynitride sputtering targets are thermally stable, allowing them to withstand the high temperatures generated during the sputtering process.

Applications:

Protective Coatings for Optics: AlON thin films are used to protect optical components from abrasion and environmental damage while maintaining transparency across UV, visible, and IR wavelengths. These coatings are valuable in lenses, windows, and other optical systems.

Transparent Armor: Aluminum Oxynitride coatings enhance the impact resistance and durability of transparent armor, providing an additional protective layer over materials like glass or polycarbonate.

Infrared and UV-Resistant Coatings: AlON’s broad-spectrum transparency makes it suitable for IR and UV applications, such as sensors and camera lenses requiring durability in harsh environments.

Aerospace and Defense: Used for coating sensors, windows, and other equipment in aerospace and defense to protect against high-speed impacts, thermal shock, and chemical exposure.

Handling and Storage:

Fragility and Surface Care: Aluminum Oxynitride targets are dense but may be brittle; careful handling is required to avoid chips or cracks. Protective packaging helps prevent damage before use.

Storage Conditions: Store AlON targets in a dry, dust-free environment to maintain purity and prevent any potential contamination on the target surface.