Aluminum Oxide：Yttrium Oxide 48.75:51.25wt%

Aluminum Oxide-Yttrium Oxide (Al₂O₃-Y₂O₃) targets are composite ceramic materials combining aluminum oxide and yttrium oxide to create a high-performance target for thin-film deposition processes, such as sputtering and laser ablation. The addition of yttrium oxide improves the thermal, mechanical, and chemical properties of the aluminum oxide matrix, making these targets ideal for applications requiring high durability, stability, and insulation.

Composition:

Aluminum Oxide (Al₂O₃): The primary matrix component, Al₂O₃, provides high hardness, wear resistance, and excellent electrical insulation, making it a reliable material for substrates and coatings in electronics and optics.

Yttrium Oxide (Y₂O₃): Y₂O₃ is added to enhance thermal stability, corrosion resistance, and toughness. Yttrium oxide also improves the composite’s resistance to thermal shock, preventing cracking and structural degradation under temperature variations.

Physical and Mechanical Properties:

High Hardness and Density: The Aluminum Oxide-Yttrium Oxide (Al₂O₃-Y₂O₃) composite maintains the high hardness of aluminum oxide, with added toughness from yttrium oxide, making the target durable and resistant to wear during sputtering and other coating processes.

Enhanced Toughness and Stability: Y₂O₃ contributes to improved fracture toughness, enhancing the structural stability of the target. This is especially beneficial in high-stress applications where traditional materials might crack or degrade.

Thermal Properties:

High Thermal Stability: Aluminum Oxide-Yttrium Oxide (Al₂O₃-Y₂O₃) targets can withstand extremely high temperatures, making them ideal for coatings and films used in high-temperature applications. The composite’s melting point is well above 2000°C.

Thermal Shock Resistance: Yttrium oxide improves resistance to rapid temperature changes, which prevents the target from cracking or warping under intense heating and cooling cycles.

Electrical and Insulating Properties:

Excellent Electrical Insulation: Aluminum oxide provides high dielectric strength, making this composite material suitable for electrical insulation in electronics. This property is useful in applications requiring an insulating layer to prevent electrical interference.

Low Dielectric Loss: This property is advantageous in high-frequency applications, where energy efficiency and minimal power loss are important.

Chemical Stability and Corrosion Resistance:

Inertness to Chemical Attack: The Aluminum Oxide-Yttrium Oxide (Al₂O₃-Y₂O₃) combination enhances chemical resistance, making the target stable and inert in corrosive environments. This chemical stability is valuable in coating applications where long-term durability is required.

Applications:

Optical Coatings: The composite’s transparency in certain spectral ranges makes it suitable for optical coatings on lenses and precision optics, providing protective and anti-reflective layers.

Electronics and Thin-Film Deposition: Aluminum Oxide-Yttrium Oxide (Al₂O₃-Y₂O₃) targets are frequently used to deposit thin, insulating layers on semiconductor wafers and electronic components, enhancing durability and protecting circuits from environmental damage.

Thermal Barrier Coatings: With its thermal stability and resistance to chemical attack, this composite is ideal for thermal barriers on components exposed to high temperatures, such as turbine blades and other aerospace applications.

Protective Coatings: The chemical and wear resistance of Al₂O₃-Y₂O₃ targets make them suitable for protective coatings on tools, machinery parts, and other surfaces subject to wear or chemical exposure.