{"id":999671,"date":"2024-06-17T14:11:32","date_gmt":"2024-06-17T06:11:32","guid":{"rendered":"https:\/\/vimaterial.de\/product\/silicon-3\/"},"modified":"2026-09-18T14:30:24","modified_gmt":"2026-09-18T06:30:24","slug":"silicon-sputtering-target","status":"publish","type":"product","link":"https:\/\/vimaterial.de\/en\/product\/silicon-sputtering-target\/","title":{"rendered":"Silicon"},"content":{"rendered":"

Silicon<\/a><\/span> sputtering targets are dark-grey solid materials widely used in PVD thin-film deposition for semiconductor, solar cell, display, optical coating and microelectronics applications. With high purity and good thermal and electrical properties, silicon targets are suitable for producing silicon-containing thin films and functional coatings with controlled composition and thickness.<\/p>\n

VIMATERIAL<\/a><\/span> supplies monocrystalline and polycrystalline silicon sputtering targets in standard and customized configurations. Targets can be manufactured in different shapes and dimensions according to customer drawings, with optional target bonding services for specific sputtering systems. Contact us<\/a><\/span><\/strong> for more information.<\/p>\n

Physical Properties of Silicon<\/span><\/h2>\n\n\n\n\n\n\n\n\n\n\n
Property<\/strong><\/td>\nValue<\/strong><\/td>\n<\/tr>\n
Molecular formula<\/td>\nSi<\/td>\n<\/tr>\n
Atomic number<\/td>\n14<\/td>\n<\/tr>\n
Appearance<\/td>\nDark grey solid<\/td>\n<\/tr>\n
Melting point<\/td>\n1414\u00b0C<\/td>\n<\/tr>\n
Boiling point<\/td>\n3265\u00b0C<\/td>\n<\/tr>\n
Density<\/td>\n2.329 g\/cm\u00b3<\/td>\n<\/tr>\n
Thermal conductivity<\/td>\n149 W\u00b7m\u207b\u00b9\u00b7K\u207b\u00b9<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Silicon Sputtering Target Specifications<\/span><\/h2>\n\n\n\n\n\n\n\n\n\n\n
Item<\/strong><\/td>\nSpecification<\/strong><\/td>\n<\/tr>\n
Material<\/td>\nSilicon (Si)<\/td>\n<\/tr>\n
Structure<\/td>\nMonocrystalline \/ Polycrystalline<\/td>\n<\/tr>\n
Purity<\/td>\n99.999%, 99.9999%<\/td>\n<\/tr>\n
Target shapes<\/td>\nPlane, rotating, special-shaped<\/td>\n<\/tr>\n
Dimensions<\/td>\nStandard or customized according to drawings<\/td>\n<\/tr>\n
Bonding<\/td>\nAvailable upon request<\/td>\n<\/tr>\n
Packaging<\/td>\nVacuum inner packaging + protective outer packaging<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

For non-standard dimensions, please provide your target drawings, dimensions, sputtering system and application requirements so we can recommend a suitable configuration.<\/span><\/p>\n

Applications of Silicon Sputtering Target<\/span><\/h2>\n