{"id":1030666,"date":"2024-06-27T19:42:07","date_gmt":"2024-06-27T11:42:07","guid":{"rendered":"https:\/\/vimaterial.de\/product\/silicon-5\/"},"modified":"2026-09-18T14:48:50","modified_gmt":"2026-09-18T06:48:50","slug":"silicon-rotary-target","status":"publish","type":"product","link":"https:\/\/vimaterial.de\/en\/product\/silicon-rotary-target\/","title":{"rendered":"Silicon"},"content":{"rendered":"<p><span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/vimaterial.de\/en\/search\/?type=element&amp;keyword=Si\">Silicon<\/a><\/span> rotary targets, also known as silicon tube targets, are cylindrical sputtering targets made from high-purity silicon (Si) and designed for rotary cathode sputtering systems. With a typical diamond cubic crystal structure, dark grey to metallic grey appearance, and good thermal stability, silicon rotary targets are used for semiconductor, photovoltaic, optical coating and functional thin-film applications.<\/p>\n<p><span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/vimaterial.de\/en\/about-vimaterial\/\">VIMATERIAL<\/a><\/span> supplies silicon rotary targets in different purity grades and configurations, including sprayed tube targets in 99.9% and 99.95% purity and bonded tube targets up to 99.999% purity. Target dimensions, tube geometry and bonding configuration can be customized according to your sputtering equipment and technical requirements.<\/p>\n<p>With professional experience in rotary target manufacturing and target bonding, VIMATERIAL provides material selection, customized target production and bonding support for laboratory, pilot and industrial applications. <span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/vimaterial.de\/en\/contact-us\/\">Contact us<\/a><\/span> for more information.<\/p>\n<h2><span style=\"font-size: 14pt;\">Key Features<\/span><\/h2>\n<ul>\n<li>High-purity silicon<\/li>\n<li>Uniform composition<\/li>\n<li>Rotary tube configuration<\/li>\n<li>Sprayed or bonded construction<\/li>\n<li>Customized dimensions<\/li>\n<li>Professional bonding service<\/li>\n<li>Flexible customization<\/li>\n<\/ul>\n<h2><span style=\"font-size: 14pt;\">Physical Properties of Silicon<\/span><\/h2>\n<table style=\"border-collapse: collapse; width: 46.9978%; height: 216px;\">\n<tbody>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\"><strong>Property<\/strong><\/td>\n<td style=\"width: 23.2395%; height: 24px;\"><strong>Value<\/strong><\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Molecular formula<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">Si<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Atomic number<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">14<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Appearance<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">Dark grey to metallic grey<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Melting point<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">1414\u00b0C<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Boiling point<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">3265\u00b0C<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Density<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">2.329 g\/cm\u00b3<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Crystal structure<\/td>\n<td style=\"width: 23.2395%; height: 24px;\">Diamond cubic<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2><span style=\"font-size: 14pt;\">Specifications<\/span><\/h2>\n<table style=\"border-collapse: collapse; width: 61.9719%; height: 216px;\">\n<tbody>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\"><strong>Item<\/strong><\/td>\n<td style=\"width: 55.1007%; height: 24px;\"><strong>Specification<\/strong><\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Material<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">Silicon (Si)<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Purity<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">99.9%, 99.95%, up to 99.999%<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Target type<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">Rotary \/ Tube Target<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Manufacturing options<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">Sprayed tube target \/ Bonded tube target<\/td>\n<\/tr>\n<tr>\n<td style=\"width: 23.7583%;\">Shape<\/td>\n<td style=\"width: 55.1007%;\">Cylindrical tube<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Dimensions<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">Customized according to drawings<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Bonding<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">Available upon request<\/td>\n<\/tr>\n<tr style=\"height: 24px;\">\n<td style=\"width: 23.7583%; height: 24px;\">Application<\/td>\n<td style=\"width: 55.1007%; height: 24px;\">Rotary cathode sputtering<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>For customized silicon rotary targets, please provide the target drawing, tube dimensions, required purity, sputtering system and bonding requirements.<\/p>\n<h2><span style=\"font-size: 14pt;\">Sprayed Silicon Tube Targets<\/span><\/h2>\n<p>VIMATERIAL supplies sprayed silicon tube targets in 99.9% and 99.95% purity for applications where a cost-effective rotary target configuration and reliable sputtering performance are required.<\/p>\n<p>The sprayed target structure is suitable for specific rotary sputtering systems and can be customized according to target dimensions and equipment requirements.<\/p>\n<h2><span style=\"font-size: 14pt;\">Bonded Silicon Tube Targets<\/span><\/h2>\n<p>For applications requiring higher material purity and a specific rotary cathode configuration, VIMATERIAL supplies bonded silicon tube targets up to 99.999% purity.<\/p>\n<p>Professional target bonding helps establish a reliable connection between the silicon target and the backing tube or assembly, supporting heat transfer and mechanical stability during sputtering.<\/p>\n<h2><span style=\"font-size: 14pt;\">Applications of Silicon Rotary Targets<\/span><\/h2>\n<ul>\n<li><strong>Semiconductor and Microelectronics: <\/strong>Silicon rotary targets can be used in PVD processes for depositing silicon-containing thin films and functional layers in semiconductor and microelectronics research and manufacturing.<\/li>\n<li><strong>Photovoltaics: <\/strong>Silicon targets are used in thin-film deposition processes associated with photovoltaic and solar-energy materials, where controlled film composition, thickness and uniformity are important.<\/li>\n<li><strong>Optical Coatings: <\/strong>Silicon rotary targets can be used to deposit silicon-containing films for optical coatings, filters, protective layers and other thin-film optical components.<\/li>\n<li><strong>Architectural and Functional Glass: <\/strong>Silicon-containing layers can be incorporated into multilayer coating systems for architectural glass and functional coated glass, including applications where optical, protective or barrier properties are required.<\/li>\n<\/ul>\n<h2><span style=\"font-size: 14pt;\">Why Use a Rotary Silicon Target?<\/span><\/h2>\n<p>Compared with conventional planar target configurations, rotary targets are designed for rotary cathode sputtering systems and can support continuous target rotation and efficient utilization of the target material.<\/p>\n<p>For large-area coating processes, rotary target systems can be particularly useful where stable deposition conditions, long operating cycles and effective target utilization are important.<\/p>\n<p>The appropriate target structure depends on the sputtering equipment, power configuration, coating process and required film properties.<\/p>\n<h2><span style=\"color: #0000ff;\"><a style=\"color: #0000ff;\" href=\"https:\/\/vimaterial.de\/en\/quality-control\/\"><span style=\"font-size: 14pt;\">Quality Control<\/span><\/a><\/span><\/h2>\n<p>VIMATERIAL maintains quality control throughout the manufacturing process, from raw material selection to finished target inspection.<\/p>\n<p>Key parameters can include:<\/p>\n<ul>\n<li>Chemical purity and composition<\/li>\n<li>Target dimensions and geometry<\/li>\n<li>Density<\/li>\n<li>Crystal structure<\/li>\n<li>Surface condition<\/li>\n<li>Bonding quality, where applicable<\/li>\n<\/ul>\n<p>Inspection records can be maintained for product traceability. Third-party inspection can also be arranged upon request according to project requirements.<\/p>\n<h2><span style=\"font-size: 14pt;\">Packaging &amp; Storage<\/span><\/h2>\n<p>Silicon rotary targets are vacuum-sealed with protective inner packaging and packed in customized high-strength wooden crates to reduce the risk of contamination and mechanical damage during transportation.<\/p>\n<p>Store in a clean, dry and well-ventilated environment at room temperature, protected from moisture, corrosive gases, excessive heat and mechanical impact. Keep the original packaging intact until the target is ready for installation.<\/p>\n<h2><span style=\"font-size: 14pt;\">FAQs<\/span><\/h2>\n<h3><span style=\"font-size: 12pt;\">Q1. What purity grades of silicon rotary targets do you provide?<\/span><\/h3>\n<p>VIMATERIAL supplies 99.9%, 99.95% and up to 99.999% purity silicon rotary targets. The available purity depends on the target manufacturing and bonding configuration.<\/p>\n<h3><span style=\"font-size: 12pt;\">Q2. What is the difference between sprayed and bonded silicon tube targets?<\/span><\/h3>\n<p>Sprayed silicon tube targets are manufactured using a coating\/spraying process and are available in 99.9% and 99.95% purity. Bonded silicon tube targets use a bonding process to connect the silicon target with the corresponding backing assembly and are available up to 99.999% purity.<\/p>\n<h3><span style=\"font-size: 12pt;\">Q3. Can silicon rotary targets be customized?<\/span><\/h3>\n<p>Yes. We can customize the diameter, length, wall thickness, target geometry, purity and bonding configuration according to your drawings and sputtering equipment.<\/p>\n<h3><span style=\"font-size: 12pt;\">Q4. Do you provide target bonding?<\/span><\/h3>\n<p>Yes. VIMATERIAL provides target bonding services for suitable silicon rotary target configurations. Please provide the target dimensions and backing tube\/cathode requirements for technical evaluation.<\/p>\n<h3><span style=\"font-size: 12pt;\">Q5. What information is required for a quotation?<\/span><\/h3>\n<p>Please provide the purity, target type, outer diameter, inner diameter, length, wall thickness, quantity, sputtering system and bonding requirements. A technical drawing is preferred for customized targets.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Silicon rotary targets, also known as silicon tube targets, are cylindrical sputtering targets made from high-purity silicon (Si) and designed for rotary cathode sputtering systems. With a typical diamond cubic crystal structure, dark grey to metallic grey appearance, and good thermal stability, silicon rotary targets are used for semiconductor, photovoltaic, optical coating and functional thin-film [&hellip;]<\/p>\n","protected":false},"featured_media":1034760,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[264],"product_cat":[99],"product_tag":[631,327],"class_list":["post-1030666","product","type-product","status-publish","has-post-thumbnail","product_brand-vimaterial","product_cat-rotary-targets","product_tag-rotary","product_tag-sputtering-targets","first","instock","shipping-taxable","product-type-variable"],"acf":[],"_links":{"self":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product\/1030666","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/comments?post=1030666"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/media\/1034760"}],"wp:attachment":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/media?parent=1030666"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product_brand?post=1030666"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product_cat?post=1030666"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product_tag?post=1030666"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}