{"id":1005975,"date":"2024-06-17T15:47:30","date_gmt":"2024-06-17T07:47:30","guid":{"rendered":"https:\/\/vimaterial.de\/product\/tantalum-pentoxide-4\/"},"modified":"2026-09-02T17:24:50","modified_gmt":"2026-09-02T09:24:50","slug":"tantalum-pentoxide-sputtering-target","status":"publish","type":"product","link":"https:\/\/vimaterial.de\/en\/product\/tantalum-pentoxide-sputtering-target\/","title":{"rendered":"Tantalum Pentoxide"},"content":{"rendered":"

Tantalum Pentoxide<\/a><\/span> Sputtering Target is a high-performance ceramic sputtering material widely used for depositing dielectric, optical, and protective thin films. Ta\u2082O\u2085 combines a high dielectric constant, high refractive index, excellent chemical stability, and good thermal stability, making it suitable for advanced thin-film deposition applications.<\/p>\n

VIMATERIAL<\/a><\/strong><\/span> supplies high-purity Ta\u2082O\u2085 sputtering targets in various sizes, shapes, and configurations to meet the requirements of semiconductor, optical coating, electronics, and other thin-film applications. Contact us<\/a><\/strong><\/span> for more information.<\/p>\n

Product Specifications<\/span><\/h2>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Item<\/strong><\/td>\nSpecification<\/strong><\/td>\n<\/tr>\n
Product Name<\/td>\nTantalum Pentoxide Sputtering Target<\/td>\n<\/tr>\n
Chemical Formula<\/td>\nTa\u2082O\u2085<\/td>\n<\/tr>\n
Molecular Weight<\/td>\n441.89 g\/mol<\/td>\n<\/tr>\n
Purity<\/td>\n99.95% \u2013 99.99%<\/td>\n<\/tr>\n
Appearance<\/td>\nWhite to off-white ceramic solid<\/td>\n<\/tr>\n
Density<\/td>\nApprox. 8.2 g\/cm\u00b3<\/td>\n<\/tr>\n
Melting Point<\/td>\nApprox. 1872\u00b0C<\/td>\n<\/tr>\n
Refractive Index<\/td>\nApprox. 2.1<\/td>\n<\/tr>\n
Dielectric Constant<\/td>\nApprox. 25\u201335<\/td>\n<\/tr>\n
Target Type<\/td>\nPlanar \/ Rotary \/ Custom<\/td>\n<\/tr>\n
Shape<\/td>\nCircular \/ Rectangular \/ Custom<\/td>\n<\/tr>\n
Bonding<\/td>\nUnbonded \/ Backing Plate Bonded<\/td>\n<\/tr>\n
Deposition Methods<\/td>\nDC \/ RF \/ Reactive Sputtering<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

*Note: The actual density, dielectric constant, refractive index, and other properties may vary depending on target purity, microstructure, deposition conditions, and measurement method.<\/em><\/p>\n

Key Features<\/span><\/h2>\n
    \n
  • High Dielectric Constant<\/li>\n
  • High Refractive Index<\/li>\n
  • Excellent Chemical Stability<\/li>\n
  • High Thermal Stability<\/li>\n
  • Suitable for High-Performance Thin Films<\/li>\n<\/ul>\n

    Applications of Tantalum Pentoxide Sputtering Target<\/span><\/h2>\n
      \n
    • Semiconductor & Microelectronics: <\/strong>Used for high-k dielectric layers, capacitor dielectric films, and insulating layers in semiconductor and electronic devices.<\/li>\n
    • Optical Coatings: <\/strong>Used in anti-reflective coatings, high-reflection coatings, optical filters, lenses, and other multilayer optical films.<\/li>\n
    • Electronic Components: <\/strong>Suitable for dielectric films in capacitors, sensors, and other electronic and optoelectronic components.<\/li>\n
    • Functional & Protective Coatings: <\/strong>Used as functional or protective thin films where high dielectric properties, chemical stability, and thermal stability are required.<\/li>\n<\/ul>\n

      Target Options\/Customization<\/span><\/h2>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
      Target Parameter<\/strong><\/td>\nRecommended Content<\/strong><\/td>\n<\/tr>\n
      Purity<\/td>\n99.95% \/ 99.99%<\/td>\n<\/tr>\n
      Density<\/td>\n\u2265 theoretical density \/ actual value<\/td>\n<\/tr>\n
      Shape<\/td>\nCircular \/ Rectangular \/ Custom<\/td>\n<\/tr>\n
      Dimensions<\/td>\nCustomized<\/td>\n<\/tr>\n
      Thickness<\/td>\nCustomized<\/td>\n<\/tr>\n
      Bonding<\/td>\nIndium \/ Elastomer \/ Unbonded<\/td>\n<\/tr>\n
      Backing Plate<\/td>\nCu \/ Mo \/ SS \/ Customized<\/td>\n<\/tr>\n
      Sputtering<\/td>\nRF \/ Reactive<\/td>\n<\/tr>\n
      Packaging<\/td>\nVacuum \/ Inert Gas \/ Moisture-Proof<\/td>\n<\/tr>\n
      Lead Time<\/td>\nIn Stock \/ 2\u20134 Weeks<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

      For special deposition requirements, target composition, density, dimensions, and bonding specifications can be discussed according to the customer’s sputtering equipment and process parameters.<\/p>\n

      Why Choose VIMATERIAL?<\/span><\/h2>\n
        \n
      • High Purity: <\/strong>Available in high-purity grades to reduce contamination during thin-film deposition.<\/li>\n
      • Stable Composition: <\/strong>Controlled Ta\u2082O\u2085 composition supports consistent film quality and deposition performance.<\/li>\n
      • Custom Dimensions: <\/strong>Target dimensions and configurations can be customized according to sputtering equipment requirements.<\/li>\n
      • Multiple Purity Options:\u00a0<\/strong>Purity levels can be selected according to different research, optical coating, semiconductor, and industrial applications.<\/li>\n
      • Professional Technical Support: <\/strong>We can assist with target specifications, dimensions, bonding requirements, and material selection for specific deposition processes.<\/li>\n<\/ul>\n

        Packaging and Storage<\/span><\/h2>\n

        Tantalum oxide sputtering targets are carefully packaged to protect them from moisture, contamination, mechanical damage, and surface contamination during transportation and storage.<\/p>\n

        Targets should be stored in a clean, dry environment and kept in their original sealed packaging until use. When bonded targets are supplied, additional protection is used to prevent damage to the target and backing plate during transportation.<\/p>\n

        FAQs<\/span><\/h2>\n

        Q1. What is a tantalum pentoxide sputtering target?<\/span><\/h3>\n

        A Tantalum pentoxide sputtering target is a ceramic target made from high-purity tantalum pentoxide and used as a source material for depositing tantalum oxide thin films by sputtering.<\/p>\n

        Q2. What is tantalum oxide sputtering target used for?<\/span><\/h3>\n

        Tantalum oxide sputtering targets are mainly used for optical coatings, high-k dielectric films, capacitors, semiconductor devices, electronic components, and functional thin films.<\/p>\n

        Q3. Can Ta\u2082O\u2085 targets be customized?<\/span><\/h3>\n

        Yes. Ta\u2082O\u2085 targets can be customized in terms of purity, dimensions, shape, thickness, backing plate, and bonding configuration according to the customer’s sputtering equipment and technical requirements.<\/p>\n

        Q4. Is Ta\u2082O\u2085 a high-k dielectric material?<\/span><\/h3>\n

        Yes. Ta\u2082O\u2085 is widely studied and used as a high-k dielectric material because its dielectric constant is significantly higher than that of conventional SiO\u2082.<\/p>\n","protected":false},"excerpt":{"rendered":"

        Tantalum Pentoxide Sputtering Target is a high-performance ceramic sputtering material widely used for depositing dielectric, optical, and protective thin films. Ta\u2082O\u2085 combines a high dielectric constant, high refractive index, excellent chemical stability, and good thermal stability, making it suitable for advanced thin-film deposition applications. VIMATERIAL supplies high-purity Ta\u2082O\u2085 sputtering targets in various sizes, shapes, and […]<\/p>\n","protected":false},"featured_media":1033063,"comment_status":"open","ping_status":"closed","template":"","meta":{"_acf_changed":false},"product_brand":[264],"product_cat":[86],"product_tag":[373,327,537],"class_list":["post-1005975","product","type-product","status-publish","has-post-thumbnail","product_brand-vimaterial","product_cat-planer-targets","product_tag-ceramic-sputtering-targets","product_tag-sputtering-targets","product_tag-tantalum-pentoxide","first","instock","shipping-taxable","product-type-variable"],"acf":[],"_links":{"self":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product\/1005975","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/comments?post=1005975"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/media\/1033063"}],"wp:attachment":[{"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/media?parent=1005975"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product_brand?post=1005975"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product_cat?post=1005975"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/vimaterial.de\/en\/wp-json\/wp\/v2\/product_tag?post=1005975"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}